Coverage includes elements of plasma physics, specific electron cyclotron resonance physics, and the relevant technology directed at both scientists and. We find that such a slow ion beam is very sensitive to. A 14 ghz electroncyclotronresonance ecr ion source has been designed and built at argonne. The ionization process inside an ecr ion source works by electron collision with neutrals and ions.
Ion beamsputtered and assisted deposition technologies need medium energy, 1002000 ev, ion beams of current density 1 3ma operated in a reactive and corrosive gas environment. Performance and analysis of an electron cyclotron resonance. The mean plasma potential was measured on the lbl advanced electron cyclotron resonance aecr ion source for a variety of conditions. The ions in the plasma can diffuse to the anode wall, where a slit may be placed to allow these ions to escape the source and form an ion beam. Abstract the ion production in an ecris is modelled using a particleincell montecarlo collision code in a threedimensional geometry. Electron cyclotron resonance ecr is an advanced excitation method used in plasma engineering. Design of a 10 ghz minimumb quadrupole permanent magnet electron cyclotron resonance ion source.
Experiment and analysis of the neutralization of the. Electron dynamics in an electron cyclotron resonance ion source is numerically simulated by using a particleincell code combined with simulations of the ion dynamics. Therefore we recall their basic principles and possibilities, propose practical scaling laws and give recent performances. Geller was dedicated to electron beam ion sources ebis and electron cyclotron resonance. The ecr ion source makes use of this electron cyclotron resonance condition to heat the plasma. The ecr source is smaller than the cryebis, providing ions with lower mass and ultimate charge state, but with much greater beam current. The electron cyclotron resonance ion source ecris may be most simply described as a magnetic bottle in which electrons are confined and heated by a microwavefrequency field via the cyclotron resonance. The electron cyclotron resonance ion source ecris is a plasmabased device designed to produce intense beams of multiply charged ions.
Plasma in the source is a microwave lowpressure 108106 mbar discharge in a static magnetic field of a few tesla. For each of these source types, the present operational sources will be compared to the stateoftheart research devices with special attention given to reliability and availability. Development of ecr ion source introduction the use of electron cyclotron resonance ecr ion sources for the production of intense beams of highly charged ions has immensely grown over the last decade. Highly charged ions are produced in successive stepbystep collisions.
Design of a permanent magnet electroncyclotron resonance. Proton and ion sources for high intensity accelerators. Lpsc has been involved for several years in a challenging research and development program on the production of pulsed ions beams with high ionization efficiency primarily dedicated to radioactive ion beams. Numerical model of electron cyclotron resonance ion source i. Status of new electron cyclotron resonance ion sources at. Ecr ion source techniques for multicharged ion production. Electron cyclotron resonance an overview sciencedirect topics. The ecr ion source makes use of the electron cyclotron resonance to ionize a plasma. Electron cyclotron resonance ion sources physics, technology and future challenges article pdf available in the european physical journal conferences 149. Figure 1 shows the schematic drawing of the crs linac. For the rst time the magnetized volume quali ed for electron cyclotron resonance at 2. A necessary condition for hci production are long ion. An electron cyclotron resonance ion source in which a plasma is confined in a magnetic configuration having a first group of coils located in the plane defined by the tight window of an ultrahigh frequency injector and surrounding the latter, supplying the magnetic field creating and confining a plasma as well as a second group of coils supplied in counterfield compared with the first group.
There is no sharp distinction between radio waves rf and microwaves, but typically microwaves are in the gigahertz 10 9 hertz range with a wavelength shorter than about 30 centimeters. Ecr ion sources are used as injectors into linear accelerators, vandegraaff generators or cyclotrons in nuclear and elementary particle physics. Production of highly charged ion beams from electron. This type of plasma ion source is suitable for longterm operation requiring intense ion beams of heavy elements since there are no wearing parts such as cathodes in an ecris. Ep0127523a1 electroncyclotron resonance ion source. Electron cyclotron resonance ion source ecris aamop 20112012 20111102 20 hot palsma configuredwithsix cusps. The model is a combination of three dimensional 3d mapping of the plasma background calculated by a 1d generalised ecris model gem1d 1 and 3d tracking of the ion trajectories with monte carlo charge breeding code mcbc 2. Ion thrusters, which are composed of an ion source and a neutralizer, utilize a sharply electrostatic potential gradient to extract ion beams from their ion source to produce thrust. If the pressure is too low, the electrons will oscillate without colliding with the rest gas, until the high electron space charge forces them to the anode wall. Us4638216a electron cyclotron resonance ion source. A compact electron cyclotron resonance source for 2002000 ev. Ecr electron cyclotron resonance ion sources are now in widespread use for the production of high quality multiply charged ion beams for accelerators and atomic physics experiments, and industrial applications are being explored. Pdf characterization of proton beam emission from an. Pdf modeling of electron cyclotron resonance ion source plasmas.
Important features of electron cyclotron resonance ion source ecris operation are accurately reproduced with a numerical code. Electron cyclotron resonance ion sources ecris part ii. But we also emphasize that the radiations issuing from the ecr plasma are valuable for atomic physics. The use of a quartz liner in the electron cyclotron resonance ecr ion source of atlas reduced the intensity of the interfering 39 k isobar background by a factor of. Numerical model of electron cyclotron resonance ion source. Electron cyclotron resonance ion sources ecris are used for highly charged ion hci production for accelerator based physics research. The numerical advanced model of electron cyclotron resonance ion source n amecris is applied for studies of the physical processes in the source. Several general characteristics of ecr sources explain their widespread acceptance. This paper presents a simulation study of a permanent magnet electron cyclotron resonance ion source ecris with a minimumb quadrupole magnetic field. An ion source according to any one of claims 1 to 6, characterized in that the magnetic field corresponding to the cyclotron resonance is reached at a distance of the order of a few centimeters downstream of the junction of the system microwave injection 8 with the cavity 9 of the ion source. The use of electron cyclotron resonance ecr ion sources for the production of intense beams of highly charged ions has immensely grown over the last. For use with cyclotrons which require cw multiply charged ion beams, the ecr. The electrons are e ectively heated by the microwaves, most e ectively for those meeting the electron cyclotron resonance condition.
Equation 1 shows that the ecr condition in general and the resonance frequency. We designed, built and characterized a compact electron cyclotron resonance ion beam source generating 2 cm diameter ion beams with currents of 20 ma and energy 200. This pmecr ion source was originally designed to substitute for. Some aspects of electron dynamics in electron cyclotron. Ion extraction from decrispm source is simulated by using initial.
One is especially interested in this for directly heating the ions in a plasma. The electron cyclotron resonance ecr ion source ecris is used worldwide to deliver highly charged ions for particle accelerators to get very high energy beams at the end. The thesis begins with a theoretical discussion dealing with plasma physics relevant for the production of highly charged ions in ecr ion source plasmas. Electron cyclotron resonance ion sources physics, technology and future challenges. Pdf numerical model of electron cyclotron resonance ion source. Pdf optimization of a chargestate analyzer for electron.
During the last 16 years th e heavy ion beams at ithemba labs were produced in a 10 ghz minimafios electron cyclotron resonance ion source ecris. Cyclotron resonance an overview sciencedirect topics. The working area of an electroncyclotron resonance ecr ion source is a plasma, which is held by an outer magnetic field. Cornelius, scientific solutions, po box 500207, san diego ca 92150 abstract a design for a permanent magnet electron cyclotron resonance pmecr ion source is presented. Accepted manuscript spatial distributions of plasma. Characterization of proton beam emission from an electron cyclotron resonance ion source. Depending on the phase of the electron and the rf wave the electron can be heated or cooled. The numerical advanced model of electron cyclotron resonance ion source namecris is applied for studies of the physical processes in the source. Steyaert laboratoire du cyclotron chemin du cyclotron, 2 b 48 louvainlaneuve belgium summary an e. The code uses the particleincell technique to model a dynamics of. Accepted manuscript spatial distributions of plasma potential. In 2006 the decision was made that, due to the requirements of nuclear physics for new ion species and higher particle energies, a new 3rd generation ecris should be procured. Free electrons in a high magnetic field environment will rotate with a uniform frequency. Such ionic intensity is very easy to extract from a classical electron cyclotron resonance ion source ecris.
Electron cyclotron resonance ion sources and ecr plasmas provides a primer on electron cyclotron phenomena in ion sources as well as being a reference to the field of ion source developments. On optical properties of ion beams extracted from electron cyclotron resonance ion source v. Ion beam characteristics are often decisive factors for experimental atomic physics and ecr sources for highly charged ions play then an important role 1. Electron cyclotron resonance an overview sciencedirect. Reducing potassium contamination for ams detection of 39ar. A radio frequency system of 500 w output power from 10. Such techniques greatly enhance the production of highly charged ions from ecriss. Only the heavy particles ions and atoms are tracked, with the electron density determined from the. Electron cyclotron resonance ion sources and ecr plasmas. The underlying principle of ecr is explained by lorentz force. Electron cyclotron resonance ion source ecris is a plasmabased device designed to produce intense beams of multiply charged ions 1. Pdf microwave to plasma coupling in electron cyclotron. Ultracompactultralow power electron cyclotron resonance ion source for multipurpose applications. It is used for accelerating ions in a cyclotron, and for measuring the masses of an ionized analyte in mass spectrometry, particularly with fourier transform ion cyclotron resonance.
Field structure and electron life times in the mefisto. These plasma potentials are positive with respect to the plasma chamber wall and are on the order of tens of volts. Palladino p360 usa calculations and experiments have been made on the ion cyclotron resonance phenomenon in a fully ionized gas. Electron cyclotron resonance ecr microwavebased plasma has been developed primarily for applications with reactive etching or deposition. On optical properties of ion beams extracted from electron. The commissioning of helium injector including electron cyclotron resonance ecr ion source and low energy beam transport lebt has completed 4 and the input. Loginov joint institute for nuclear research, flerov laboratory of nuclear reactions, dubna, moscow reg. The super position of solenoid and sextupole magnets in an ecr source leads to very complex forces. Usedon cyclotrons and synchrotrons for the production of hci beams. The injected microwaves heat free electrons in the gas which in turn collide with the atoms or molecules of the gas in the volume and cause ionization.
Enhanced physicochemical and biological properties of ion. The mean potentials for plasmas of oxygen, argon, and argon mixed with oxygen in the aecr were determined. The two devices and their crossed beamlines constitute the low energy ion collision. A new 14 ghz electroncyclotronresonance ion source for the. The electron current is literally extracted from the discharge plasma, which is produced electrodelessly. Vondrasek, anl, argonne, il 604390, usa abstract a computer model for both electrons and multiple ion species in an electron cyclotron resonance ion source. Beam current oscillations driven by cyclotron instabilities in a minimumb electron cyclotron resonance ion source plasma plasma sources sci. Pdf the influence of magnetic field configuration on an. Pdf numerical model of electron cyclotron resonance ion. The application of an electrodeless, high density plasma source using electron cyclotron resonance ecr was a breakthrough in dry etching technologies 3.
A new 14 ghz electroncyclotronresonance ion source ecris. It is used for accelerating ions in a cyclotron, and for measuring the masses of an ionized analyte in mass spectrometry, particularly with fourier transform ion cyclotron resonance mass spectrometers. Pdf modeling of electron cyclotron resonance ion source. Pang states that a cl 2 plasma ignited by an ecr source will produce vertical profiles without the need for side wall. Electron cyclotron resonance ecr plasma and, more recently, helicon plasma ap. Electron cyclotron resonance ecr ion sources are scientific instruments particularly useful for physics. Ions in these sources are created and extracted from a plasma produced by ecrdischarge in a usually very strong bminimum type magnetic trap. The mean potentials for plasmas of oxygen, argon, and argon mi. The electron cyclotron resonance source ecr is a plasma device designed to provide highlycharged ions at low velocities.
The working area of an electron cyclotron resonance ecr ion source is a plasma, which is held by an outer magnetic field. Plasma potentials and performance of the advanced electron. Microwave to plasma coupling in electron cyclotron resonance and microwave ion sources invited. Design of a permanent magnet electroncyclotron resonance ecr ion source wayne d. B 1 t resonance for 28 ghz ecr heating occurs when the electron cyclotron frequency equals the rf frequency. A compact electron cyclotron resonance source for 2002000. Frequency scaling in ecr ion sources electron cyclotron resonance condition geller proposed scaling for ecr ion sources 1987 plasma density n e f2 based on the assumption n e electron cyclotron resonance ion source ecris is a plasmabased device designed to produce intense beams of multiply charged ions 1. An electron cyclotron resonance ion source in which a plasma is confined in a magnetic configuration having a first group of coils located in the plane defined by the tight window of an ultrahigh frequency injector and surrounding the latter, supplying the magnetic field creating and confining a plasma as well as a second group of coils supplied in counterfield compared with. The electroncyclotron resonance ion source ecris may be most simply described as a magnetic bottle in which electrons are confined and heated by a microwavefrequency field via the cyclotron resonance. Pdf available in the european physical journal conferences 149. Electron cyclotron resonance ion sources and ecr plasmas geller, r acknowledged as the founding father of and world renowned expert on electron cyclotron resonance sources richard geller has produced a unique book devoted to the physics and technicalities of electron cyclotron resonance sources. Moreover, these sources are also of fundamental interest for plasma physics, because of the very particular properties of the ecr.
Electron cyclotron resonance ecr ion sources ecris 1, 2 deliver variously charged ion beams for direct applications and, more frequently, highly charged ions worldwide for high energy accelerators. Electron beam ion sources ebis electron beam ion traps ebit sources of highly charged ions. Ion cyclotron resonance is a phenomenon related to the movement of ions in a magnetic field. Electroncyclotron resonance ion sources springerlink. The ecr discharge is sustained in an rf electric field with static magnetic field. Electrons in ecris are confined by the magnetic mirror. Study of the energy modulated electron cyclotron resonance. An electron cyclotron resonance source for cyclonet y. Cyclotron resonance is a powerful tool to determine the effective mass of carriers, and to study energy band structure, electronic states, electron interactions with other elementary excitations, and electron electron excitations. Electron cyclotron resonance ion source ecris development has progressed with multiplefrequency plasma heating, higher mirror magnetic fields, and better technique to provide extra cold electrons. Their many unique features make them one of the most promising devices to produce a wide variety of low energy ion beams for direct surface treatments. Pdf electron cyclotron resonance ion sources physics. Numerical modelling of physical processes in electron cyclotron resonance ion source ecris 1 requires studies of the ion and electron dynamics in a dense hot plasma coupled with an intense microwave radiation. Microwaves are injected into a volume at the frequency corresponding to the electron cyclotron resonance, defined by the magnetic field applied to a region inside the volume.
In application of dry etching to microsensors, field emitters, and optical devices, stella w. Because the plasma discharge is the source of electrons, high plasma densities are required to produce required extraction currents for reasonably sized devices. Electron cyclotron resonance ion sources and ecr plasmas r. Modeling of electron cyclotron resonance ion source plasmas. Solutions of separately operating electron and ion modules of namecris are matched in iterative way such as to obtain the spatial distributions of the plasma density and of the plasma. Mean electron energies are found to be around 70kev, close to values that are derived from spectra of xray emission out of the source.